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Lighthouse 2014ip In-Process Particle Counter
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"...Lighthouse 2014ip In-Process Wafer Pod
Particle Counter can monitor the particles that your product sees in real
time..."
0.2 -2.0 micron, 0.1 CFM (2.83 LPM)
Now it is possible to truly monitor the
particles that your product sees. Lighthouse Introduces the In-Process
Particle Counter 2014ip to help you reach into your process and take control
of contamination where it counts.
The 2014ip can be placed in a standard FOUP or
SMIF wafer carrier and sent through your process to monitor particles,
temperature, and relative humidity in each tool, as well as on your
transport system. A 9 hour battery life and data buffer of 3000 records
allows for complete monitoring of multiple process steps. Alarms can be seen
in real time via an LED alarm light on the back of the unit. Sample times
and location labels are user configurable.
A remote start /stop switch allows the user to
control the instrument without having to open the wafer carrier. Once the
sampling is complete, data is easily download to any PC via LMS Exchange
data transport software that is included with the 2014ip In-Process Particle
Counter.
Features
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0.2 µm Sensitivity
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0.1 CFM (2.83 LPM) Flow Rate
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Designed to fit into standard FOUP or SMIF Wafer Carriers
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0.1 µm Filtered Exhaust
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Stainless Steel Enclosure
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4
to 6 Channels of Simultaneous Particle Data
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Optional Temperature and Relative Humidity Measurements
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LED Status Indicators
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LED Alarm Light
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Remote Start / Stop While Instrument is in the FOUP or SMIF Pod
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Interfaces to Easy to Use Data Download Utilities
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Uses Internal Vacuum Pump
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9
Hour Battery Life
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Stores 3000 samples
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Designed for Reliability
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Meets JIS Standards
Applications
- Complete Semiconductor Process Particle Counting from Start to Finish
- Individual Tool Monitoring and Trouble
Shooting
- In Process Particle Contamination Studies
- R&D Tool for Semiconductor Tool
Manufacturers
- Particle Counting in SMIF or FOUP based
Semiconductor Processes
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Benefits
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2 year
manufacturer's warranty
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Counts Particles that the Product Sees While In Process
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Can be used with your existing FOUP or SMIF Wafer Pods
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Easy to Co-relate Particle Events and Tool Status
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Allows for at least 4 Witness Wafers to be Placed in a FOUP with the
Counter
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Excellent for Witness Wafer to Particle Count Comparisons
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Large Battery Allows for 9 hours of Run Time and Storage of up to 3000
data records
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Remote Start / Stop Allows for easy trouble shooting of individual tools
or multiple short sample runs without having to open the Wafer Carrier
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Low Cost of Ownership
See the particle size chart
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Tech Specs for Lighthouse Universal Manifold System and Controller |
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Size Range |
0.2 - 2.0 µm |
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Channel Sizes |
Standard: 0.2, 0.3, 0.5, 1.0 µm
Optional: 0.2, 0.3, 0.5, 0.7, 1.0, 2.0 µm
Additional size channel options available |
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Flow Rate |
0.1 CFM (2.83 LPM) |
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Counting Efficiency |
50% (per JIS) |
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Laser Source |
Laser Diode |
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Zero Count Level |
<1 count/5 minutes (per JIS) |
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Vacuum Pump |
Internal Vacuum Pump (Filtered to 0.1
µm) |
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Calibration |
NIST Traceable |
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Communication Modes |
RS-485 Modbus |
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Supporting Software |
LMS Espress, LMS XChange |
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Alarm Output |
LED Alarm Light |
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Concentration Limits |
Less than 5% at 2,000,000 /ft3 |
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Enclosure |
Stainless Steel and Aluminum |
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Power |
Internal Battery |
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Environmental Conditions |
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Operating |
50°F to 104°F (10 °C to 40 °C) / 20% to
95%, non-condensing |
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Storage |
14°F to 122°F (-10 °C to 50 °C) / Up to
98%, non-condensing |
If you
have any questions, call us, we'll be glad to help!
1-877-688-2703
Return Policy |
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